SOI MUMPS Microfabrication Process: Translating Design To Prototype

This will be a hands-on familiarization workshop on fabrication process steps, design rules and multilayer mask generation for translating a design to its prototype using the Silicon-on-Insulator (SOI) Multiuser MEMS (SOI-MUMPS.) process. The participants will be trained on how to build a prototype of a device, by using external foundry services. The training will start from (i) understanding the design rules of the foundry, (ii) checking the device design for compliance with these rules (DRC), (iii) running coupled Multiphysics simulation to extract expected performance characteristics (iv) preparation of masks and (v) virtual prototyping of each individual process step to build a 3 D model of the resulting structure using Intellifab and Intellisuite MEMS CAD tool. They will also learn the conventions of labeling the mask files and how to prepare reports for the foundry and relevant stakeholders. At the end of the session, the participants can submit a report to build a device of their interest or from one among those suggested, in the required format. The best design will be considered for upcoming fabrication runs